An Atom Probe with Ultra-Low Hydrogen Background

Autor:	Peter Felfer, Benedict Ott, Mehrpad Monajem, Valentin Dalbauer, Martina Heller, Jan Josten, Chandra Macaulay
Rok vydání:	2022
Předmět:	010302 applied physics 0103 physical sciences 02 engineering and technology 021001 nanoscience & nanotechnology 0210 nano-technology 01 natural sciences 7. Clean energy Instrumentation
Zdroj:	Microscopy and Microanalysis. 28:1255-1263
ISSN:	1435-8115 1431-9276
DOI:	10.1017/s1431927621013702
Popis:	Atom probe tomography (APT) is a single-ion sensitive time-of-flight mass spectrometry method with near-atomic spatial resolution. In principle, it can be used to detect any chemical element, but so far hydrogen in the form of protium (1H) had to be largely excluded. This is owing to the residual H emitted from the stainless-steel chambers and in-vacuum parts commonly used in atom probe instrumentation. This residual H is then picked up in the APT experiment. In this paper, we show that by replacing the stainless-steel chamber and in-vacuum parts with titanium parts, this residual H can largely be removed, thus enabling the direct imaging of H using APT. We show that besides the drastic reduction of H, also other contaminants such as O, OH, and H2O are reduced by employing this instrument. In the current set-up, the instrument is equipped with high-voltage pulsing limiting the application to conductive materials.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::771ea378159f0284847691cea4a60427 https://doi.org/10.1017/s1431927621013702 Zobrazit plný text záznamu