Mechanism of structure formation of silicon nitride with combustion of silicon in nitrogen
| Autor: | I. P. Borovinskaya, Yu. A. Gal'chenko, B. V. Stepanov, A. S. Mukas'yan |
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| Rok vydání: | 1990 |
| Předmět: |
Structure formation
Materials science Silicon General Chemical Engineering General Physics and Astronomy Energy Engineering and Power Technology chemistry.chemical_element General Chemistry Nitride Combustion Nitrogen chemistry.chemical_compound Fuel Technology Silicon nitride chemistry Chemical physics LOCOS Mechanism (sociology) |
| Zdroj: | Combustion, Explosion, and Shock Waves. 26:39-45 |
| ISSN: | 1573-8345 0010-5082 |
| DOI: | 10.1007/bf00742270 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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