| Autor: |
Takashi Okada, Shinzo Tsuboi, Masahiro Mitani, Genshiro Kawachi |
| Rok vydání: |
2007 |
| Předmět: |
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| Zdroj: |
SID Symposium Digest of Technical Papers. 38:276-279 |
| ISSN: |
0097-966X |
| DOI: |
10.1889/1.2785283 |
| Popis: |
High-frequency characteristics of sub-micron Si TFTs fabricated on large-grain poly-Si films are demonstrated for the first time. A cutoff frequency (fT) of 6 GHz and a maximum oscillation frequency (f max) of 25 GHz were obtained for the TFT with a channel length of 0.5 μm. It was confirmed that use of insulating substrates is advantageous to reduce the parasitic susceptance due to a conductive substrate, thereby increasing f max. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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