Atomic Layer Deposition for Thin Film Solid-State Battery and Capacitor

Autor:	Dohyun Go, Jeong Woo Shin, Seunghyeon Lee, Jaehyeong Lee, Byung Chan Yang, Yoonjin Won, Munekazu Motoyama, Jihwan An
Rok vydání:	2022
Předmět:	Renewable Energy Sustainability and the Environment Management of Technology and Innovation Mechanical Engineering General Materials Science Industrial and Manufacturing Engineering
Zdroj:	International Journal of Precision Engineering and Manufacturing-Green Technology. 10:851-873
ISSN:	2198-0810 2288-6206
DOI:	10.1007/s40684-022-00419-x
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::76e944faa573d82202f4f76ecf4bd742 https://doi.org/10.1007/s40684-022-00419-x Zobrazit plný text záznamu Full text from SpringerLink