Real-time determination of the amount of removed material during short pulses laser micromachining

Autor: Th. Engel, C. Stauter, Joël Fontaine
Rok vydání: 1996
Předmět:
Zdroj: Applied Surface Science. :522-527
ISSN: 0169-4332
DOI: 10.1016/0169-4332(95)00507-2
Popis: Short pulses laser generated shock waves in the air during the photoablation of different ceramics have been monitored by laser beam deflection technique. Using a model, we have related the shock wave transit time over a fixed distance to the shock wave energy. We have found that the instantaneous ablation rate is a linear function of the shock wave energy in the considered range of fluence. This technique is proved to be suitable for monitoring in real-time the laser ablation process.
Databáze: OpenAIRE