Integrated grating‐type Schottky‐barrier photodetector with optical channel waveguide

Autor:	Shyh Wang, Cheng‐Chung Tseng
Rok vydání:	1975
Předmět:	Materials science Physics and Astronomy (miscellaneous) Silicon business.industry Schottky barrier chemistry.chemical_element Photodetector Grating Nanosecond Waveguide (optics) Responsivity Optics chemistry visual_art Electronic component visual_art.visual_art_medium Optoelectronics business
Zdroj:	Applied Physics Letters. 26:632-635
ISSN:	1077-3118 0003-6951
DOI:	10.1063/1.88005
Popis:	A grating‐type Schottky‐barrier photodetector has been incorporated within an optical channel waveguide. Silicon is used as the base material for future integration of optical and electronic components. The fabrication processes are simple and completely compatible with the standard silicon planar technology. Estimated responsivity of the detector is 0.33 μA/μW at a wavelength of 0.6328 μm with nanosecond response time.
Databáze:	OpenAIRE
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