Autor:	Kazufumi Azuma, Atsusi Sasaki, Yukihiko Nakata, Tetsuya Okamoto, Goto Masashi
Rok vydání:	2004
Předmět:	Photon Oxygen atom Thin-film transistor Chemistry Excited state Plasma Electrical and Electronic Engineering Atomic physics Condensed Matter Physics Surfaces Coatings and Films
Zdroj:	SHINKU. 47:357-363
ISSN:	1880-9413 0559-8516
DOI:	10.3131/jvsj.47.357
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::76a110db654fd15a24c22bb1bac965da https://doi.org/10.3131/jvsj.47.357 Zobrazit plný text záznamu