Interconnect Fabrication on Polymer Substrate using Submicron/Nano Silver Particles with the Assistance of Low-Density Irradiations
| Autor: | Masahisa Fujino, Po-Hsiang Chiu, Jenn-Ming Song, Guo-Lun Huang |
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| Rok vydání: | 2019 |
| Předmět: |
Fabrication
Materials science 0211 other engineering and technologies General Engineering Nanoparticle Sintering 02 engineering and technology 021001 nanoscience & nanotechnology Electrical resistance and conductance Electrical resistivity and conductivity Polymer substrate General Materials Science Composite material 0210 nano-technology Electrical conductor Polyimide 021102 mining & metallurgy |
| Zdroj: | JOM. 71:3057-3065 |
| ISSN: | 1543-1851 1047-4838 |
| DOI: | 10.1007/s11837-019-03595-5 |
| Popis: | Low-energy Xenon flash pulses permit sintering of spray-pyrolyzed submicron Ag particles (SMPs) into conductive tracks with acceptable electrical resistivity (16.7 μΩ cm) on polyimide film in several seconds without extra heating. Mixed with Ag nanoparticles (20% in weight ratio), the resistivity of the obtained sintered mixed pastes can be reduced to 12.6 μΩ cm, which is nearly the same as those formed using nanoparticle pastes (11.2 μΩ cm). Using irradiation on the polymer substrate side, more uniform sintered deposits with better electrical conductance (ρ |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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