Low-voltage microscopy and position-tagged spectrometry of ceramic microstructures
| Autor: | J. J Friel, V. A. Greenhut |
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| Rok vydání: | 1996 |
| Předmět: | |
| Zdroj: | Proceedings, annual meeting, Electron Microscopy Society of America. 54:682-683 |
| ISSN: | 2690-1315 0424-8201 |
| DOI: | 10.1017/s0424820100165872 |
| Popis: | Ceramic microstructures are ideally suited for low-voltage field emission microscopy on uncoated samples. Most elements of interest in ceramics have useful X-ray lines below 5 keV, thus permitting the use of accelerating voltages between 3 and 8 kV. One analytical consequence of the use of low voltage is a reduced interaction volume with the electron beam, so that X-ray maps can be collected at submicrometer resolution. To produce usable maps at low voltage, the SEM must be capable of sufficient beam current, and the X-ray detector geometry must be optimal. Another way to optimize X-ray microanalysis is to collect an entire spectrum at every point in the microstructure even at high resolution. Although this capability would permit an X-ray spectrum to be displayed from one pixel, a much more productive approach is to create a spectrum based on all pixels of a particular phase. |
| Databáze: | OpenAIRE |
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