Focused ion beam and electron microscopy characterization of nanosharp tips and microbumps on silicon and metal thin films formed via localized single-pulse laser irradiation

Autor:	Daniel G. Georgiev, Joseph P. Moening, Joseph G. Lawrence
Rok vydání:	2011
Předmět:	Materials science Silicon business.industry Doping General Physics and Astronomy chemistry.chemical_element Laser Neodymium Focused ion beam law.invention Semiconductor Optics chemistry law Microscopy Optoelectronics business Single crystal
Zdroj:	Journal of Applied Physics. 109:014304
ISSN:	1089-7550 0021-8979
DOI:	10.1063/1.3524367
Popis:	Cross-sections of laser fabricated nanosharp tips and microbumps on silicon and metal thin films are produced and examined in this work. These structures are formed with a Q-switched neodymium doped yttrium aluminum garnet nanosecond-pulse laser, emitting at its fourth harmonic of 266 nm, using a mask projection technique to generate circular laser spots, several microns in diameter. Cross-section of selected structures were produced using a focused ion beam and were characterized via electron microscopy. The diffraction patterns of the silicon samples indicate that the laser formed tip maintains the same single crystal structure as the original silicon film. Examinations of the laser formed structures in metal films confirm that the microbumps are hollow, while revealing that the vertical protrusions are solid.
Databáze:	OpenAIRE
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