Cyclic Self-Limiting Etching of Organic Polymers

Autor:	Alok Ranjan, Roberto C. Longo, Peter L. G. Ventzek, Laxminarayan L. Raja, Barton Lane
Rok vydání:	2021
Předmět:	chemistry.chemical_classification Materials science Polymers and Plastics chemistry Chemical engineering Etching (microfabrication) Process Chemistry and Technology Organic Chemistry Self limiting Polymer
Zdroj:	ACS Applied Polymer Materials. 3:3636-3648
ISSN:	2637-6105
DOI:	10.1021/acsapm.1c00561
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::7619c1f43343dc122ed56fbbde13338a https://doi.org/10.1021/acsapm.1c00561 Zobrazit plný text záznamu