Optical Properties of Plasmonic Titanium Nitride Thin Films from Ultraviolet to Mid-Infrared Wavelengths Deposited by Pulsed-Dc Sputtering, Thermal and Plasma-Enhanced Atomic Layer Deposition

Autor:	Leonid Yu. Beliaev, Evgeniy Shkondin, Andrei Lavrinenko, Osamu Takayama
Rok vydání:	2023
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::76057e795aa999d1ebb88fbeee2bcc45 https://doi.org/10.2139/ssrn.4446510 Zobrazit plný text záznamu