A Novel Piezoresitive Microphone MEMS Sensor For Aerospace Applications

Autor: Ha Duong Ngo, Kolja Erbacher, Lixiang Wu, Bei Wang, Zirui Pang, Julien Weiss, Pablo Acedo
Rok vydání: 2022
Zdroj: 2022 International Conference on Electrical, Computer and Energy Technologies (ICECET).
Databáze: OpenAIRE