Research Activities of Nanodimensional Standards Using Atomic Force Microscopes, Transmission Electron Microscope, and Scanning Electron Microscope at the National Metrology Institute of Japan

Autor:	Kazuhiro Kumagai, Ichiko Misumi, Ryosuke Kizu, Keita Kobayashi, Hiroshi Itoh, Tomoo Sigehuzi
Rok vydání:	2021
Předmět:	Microscope Materials science law Transmission electron microscopy Scanning electron microscope Mechanical Engineering Materials Science (miscellaneous) Microscopy Nanotechnology Electron Industrial and Manufacturing Engineering law.invention Metrology
Zdroj:	Nanomanufacturing and Metrology. 5:83-90
ISSN:	2520-8128 2520-811X
DOI:	10.1007/s41871-021-00119-1
Popis:	With the progress in nanotechnology, the importance of nanodimensional standards is increasing. Realizing nanodimensional standards requires multiple types of high-precision microscopy techniques. The National Metrology Institute of Japan (NMIJ), one of the research domains in the National Institute of Advanced Industrial Science and Technology (AIST), is developing nanodimensional standards using atomic force, transmission electron, and scanning electron microscopes. The current status of nanodimensional standards in NMIJ is introduced herein.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::75b65d1c945905fcd9362ee40c61aaad https://doi.org/10.1007/s41871-021-00119-1 Zobrazit plný text záznamu Full text from SpringerLink