| Autor: |
O.F. Goktepe, G.P. Chambers, M.L. Roush, T.D. Andreadis, F. Davarya, Joseph Fine |
| Rok vydání: |
1983 |
| Předmět: |
|
| Zdroj: |
Nuclear Instruments and Methods in Physics Research. 218:747-750 |
| ISSN: |
0167-5087 |
| DOI: |
10.1016/0167-5087(83)91076-1 |
| Popis: |
Ion bombardment of materials causes the sputtering, i.e., ejection into the vacuum, of target atoms from the near surface layers. Sputtered atoms leave the target in the vicinity of the point where the incident ion strikes the surface. In addition each incident beam ion and the recoil cascade it initiates dislodge target atoms in a volume of target situated about an extension into the solid of the path of the incident ion. The dependence of the above phenomena on the angle of incidence and the energy of the ion beam have been examined using the Monte Carlo computer program EVOLVE. In the EVOLVE simulation, incident ions as well as the cascade recoils produced within the medium are followed until they escape from the solid or their energy falls below a low-energy cut-off value. The target composition is treated in semi-infinite slab geometry. Relocation and movement of target atoms by the beam and cascade recoils are recorded in three dimensions. Scattering angles are calculated using a realistic atomic potential. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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