Microstructure, mechanical properties and optical reflectance of TiNiN films deposited on silicon substrates using cathodic arc evaporation

Autor:	Rumana Akhter, Avi Bendavid, Paul Munroe
Rok vydání:	2023
Předmět:	Materials Chemistry Metals and Alloys Surfaces and Interfaces Surfaces Coatings and Films Electronic Optical and Magnetic Materials
Zdroj:	Thin Solid Films. 777:139896
ISSN:	0040-6090
DOI:	10.1016/j.tsf.2023.139896
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::759ccc67c09c9257a99c385e9e196e19 https://doi.org/10.1016/j.tsf.2023.139896 Zobrazit plný text záznamu Full Text from ScienceDirect