| Popis: |
Micro/nano machining becomes more and more important and popular. Ultra-precision machines are the fundamentals. Aiming at design and developing an ultra-precision machine tool for micro/nano machining, the slide, one of the most important part of the machine has been analyzed by FEM. The software Abaqus has been used for the analysis. Based on the full load created by the coils and permanent magnet of the linear motors, the kinetics characteristics have been analyzed. According to the analytical results, the slide structure has been optimized to fulfill the requirements of the developed micro/nano machine tool. |
