On the Use of Acoustic Methods for the Detection of Electrostatic Capture of Diaphragm in Capacitive MEMS Microphones
| Autor: | Gergely Hantos, Marc P.Y. Desmulliez, Gergely Simon |
|---|---|
| Rok vydání: | 2022 |
| Předmět: |
Stress (mechanics)
Microelectromechanical systems Materials science Microphone Diaphragm (acoustics) Acoustics Capacitive sensing Built in self repair Electrical and Electronic Engineering Electrostatics Capacitive microphone Industrial and Manufacturing Engineering Electronic Optical and Magnetic Materials |
| Zdroj: | IEEE Transactions on Components, Packaging and Manufacturing Technology. 12:454-461 |
| ISSN: | 2156-3985 2156-3950 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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