Background effects in electron stimulated desorption ion angular distribution (ESDIAD) measurements on Si(111)‐(7×7)

Autor:	Wolfgang J. Choyke, J. T. Yates, M.J. Dresser, Robert M. Wallace, P.A. Taylor
Rok vydání:	1991
Předmět:	Materials science Silicon chemistry Desorption Cathode ray chemistry.chemical_element Irradiation Electron Atomic physics Instrumentation Current density Intensity (physics) Ion
Zdroj:	Review of Scientific Instruments. 62:720-724
ISSN:	1089-7623 0034-6748
DOI:	10.1063/1.1142074
Popis:	The background effect in electron stimulated desorption ion angular distribution (ESDIAD) measurements due to soft x‐ray production on Si(111)‐(7×7) is investigated. We find that the background intensity from a Si(111)‐(7×7) surface varies linearly with incident electron beam energy and current density. It is also found that the elimination of the background effect (by subtraction) plays a crucial role in both quantitative and qualitative interpretations of digital ESDIAD measurements on silicon, as well as to similar measurements on other surfaces.
Databáze:	OpenAIRE
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