The Mechanistic Process Analysis and Temperature Effect in a Low Pressure Square Type Atomic Layer Deposition Reactor

Autor:	Muaaz Bhamjee, Junling Lu, Tien-Chien Jen, Rigardt Alfred Maarten Coetzee
Rok vydání:	2019
Předmět:	Atomic layer deposition Materials science Artificial Intelligence Control and Systems Engineering Mechanical Engineering Process analysis Analytical chemistry Type (model theory) Square (algebra)
Zdroj:	International Journal of Mechanical Engineering and Robotics Research. :792-796
ISSN:	2278-0149
DOI:	10.18178/ijmerr.8.5.792-796
Databáze:	OpenAIRE
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