Design and Modeling of Piezoelectrically Driven Micro-Actuator With Large Out-of-Plane and Low Driving Voltage for Micro-Optics
| Autor: | Chee Yee Kwok, Ssu-Han Chen, Aron Michael |
|---|---|
| Rok vydání: | 2019 |
| Předmět: |
010302 applied physics
Physics Microelectromechanical systems business.industry Mechanical Engineering 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences Piezoelectricity Out of plane Optics Residual stress Deflection (engineering) 0103 physical sciences Unimorph Electrical and Electronic Engineering 0210 nano-technology business Actuator Voltage |
| Zdroj: | Journal of Microelectromechanical Systems. 28:919-932 |
| ISSN: | 1941-0158 1057-7157 |
| DOI: | 10.1109/jmems.2019.2935007 |
| Popis: | This paper presents the design and modeling of a novel piezoelectrically driven micro-lens actuator capable of delivering large out-of-plane displacement with a low driving voltage and fast speed. The design architecture, parameter optimization, modeling and testing of the actuator are presented. The actuator consists of six unimorph piezoelectric beams operating in a d31 mode to symmetrically displace a micro-lens holding platform. The design methodology exploits the film residual stress levels and thicknesses to achieve an optimal initial static deflection of the actuator beams for generating the largest possible actuation sensitivity. Theoretical modeling shows an enhancement in the average actuation sensitivity from $0.975~ {\mu }\text{m}$ /kV/cm to $1.317~ {\mu }\text{m}$ /kV/cm by employing the methodology. The actual actuation sensitivity measured from the fabricated device shows an outstanding result of $1.45~ {\mu }\text{m}$ /kV/cm with a resonant frequency of 2 kHz. This translates to a displacement of $145~ {\mu }\text{m}$ at 22 V driving voltage. The static power consumption is measured to be below 3.5 mW under normal operations. [2019-0125] |
| Databáze: | OpenAIRE |
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