ZnO-based film bulk acoustic resonator for high sensitivity biosensor applications

Autor:	W. L. Liu, Ting-Dong Zhang, Z. Yan, Yu Wang, G. K. H. Pang, Z. T. Song, Xiaoyuan Zhou, J. Z. Chen, J. G. Cheng, S. L. Feng, L. H. Lai
Rok vydání:	2007
Předmět:	Resonator Materials science Physics and Astronomy (miscellaneous) business.industry Transmission electron microscopy Optoelectronics Electrical measurements Thin film Sputter deposition Distributed Bragg reflector business Biosensor Piezoelectricity
Zdroj:	Applied Physics Letters. 90:143503
ISSN:	1077-3118 0003-6951
DOI:	10.1063/1.2719149
Popis:	Zinc oxide (ZnO)-based film bulk acoustic resonator consisting of a piezoelectric element (Au∕ZnO∕Pt) and a Bragg reflector (ZnO∕Pt multilayer structure) has been fabricated by magnetron sputtering. The transmission electron microscopy and x-ray diffraction measurements revealed that all thin film layers in the device were well crystallized and highly textured. By electrical measurements, it was found that the device had a high resonant frequency (3.94GHz) and mass sensitivity (8970Hzcm2∕ng). The use of the device as a biosensor was demonstrated by comparing the resonant properties of the device with/without coatings of biospecies.
Databáze:	OpenAIRE
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