Properties of SBT Thin Film Synthesized by Self-seed Layer Method

Autor:	Young-Gook Son, Hyung-Sub Kim, Dong-Hyun Hwang, Ji-Un Yoon
Rok vydání:	2007
Předmět:	Materials science Materials Science (miscellaneous) Condensed Matter Physics law.invention Crystallinity Sputtering law Cavity magnetron Electrical and Electronic Engineering Physical and Theoretical Chemistry Thin film Crystallization Composite material Layer (electronics)
Zdroj:	Journal of the Korean Vacuum Society. 16:215-220
ISSN:	1225-8822
DOI:	10.5757/jkvs.2007.16.3.215
Popis:	Thin films of having structure were fabricated using self-seed layer method by R.F. Magnetron sputter. Self-seed layers were deposited at room temperature and , which had 30 nm thickness. To investigate crystallization of self-seed layer we characterized by XRD after various heat treatment. And we characterized the crystallinity and electrical properties of SBT on self-seed layer after various heat treatment.
Databáze:	OpenAIRE
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