Design and Synthesis of New Alicyclic Acrylate Polymer with Androstane Moiety for 193nm Resist

Autor:	Morio Yagihara, Kenichiro Sato, Hajime Nakao, Kunihiko Kodama, Yasumasa Kawabe, Toshiaki Aoai
Rok vydání:	1999
Předmět:	chemistry.chemical_classification Acrylate polymer Materials science Polymers and Plastics Organic Chemistry Alicyclic compound chemistry.chemical_compound chemistry Resist Polymer chemistry Materials Chemistry Moiety Organic chemistry Androstane
Zdroj:	Journal of Photopolymer Science and Technology. 12:477-486
ISSN:	1349-6336 0914-9244
DOI:	10.2494/photopolymer.12.477
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::7501930e09420e3df7b631b283851247 https://doi.org/10.2494/photopolymer.12.477 Zobrazit plný text záznamu