Evaluation of Crystal Lattice Rotation around a Stress-Induced Twin in a Step-Graded SiGe / Si (110) Using STEM Moiré Observation and its Image Analysis

Autor: Junji Yamanaka, Kosuke O. Hara, Mai Shirakura, Keisuke Arimoto, Kazuo Ishizuka, Akimitsu Ishizuka, Kiyokazu Nakagawa, Chiaya Yamamoto
Rok vydání: 2019
Předmět:
Zdroj: Microscopy and Microanalysis. 25:242-243
ISSN: 1435-8115
1431-9276
DOI: 10.1017/s1431927619001946
Databáze: OpenAIRE