Zinc Oxide Doped Indium Oxide Ohmic Contacts to p-Type GaN

Autor: Lung-Chien Chen, Chih-Ming Chen, Chie-Sheng Liu, Lu-Sheng Hong
Rok vydání: 2006
Předmět:
Zdroj: Journal of The Electrochemical Society. 153:G931
ISSN: 0013-4651
DOI: 10.1149/1.2337769
Popis: We report on the zinc oxide doped indium oxide (ZIO) transparent ohmic contact to the p-GaN. Optimum conditions were selected to minimize the lowest specific contact resistance to 1.4 X 10 -4 Ω cm 2 , as examined by transmission line model after heat treatment process at an alloying temperature of 500°C for 10 min in air. ZIO films were also applied to GaN-based light-emitting diodes (LEDs) to form an electrode with a p-type ohmic contact. A light output power and an external quantum efficiency of the LED with ZIO contact of 5.61 mW and 10.63%, respectively, were measured at a forward current of 20 mA at room temperature.
Databáze: OpenAIRE