Flash memory hole etch profile monitoring using x-ray and optical scatterometry
| Autor: | Osman Sorkhabi, Jin Zhang, Dawei Hu, Adili Aiyiti, Yung-Yi Lin, Maggie Li, Ha Quoc Thang Bui, Dave Oak, Peimei Da, Zhengquan Tan |
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| Rok vydání: | 2023 |
| Předmět: | |
| Zdroj: | Journal of Micro/Nanopatterning, Materials, and Metrology. 22 |
| ISSN: | 2708-8340 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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