Design and test of a linear micro-motion stage with adjustable stiffness and frequency

Autor:	Ruiqi Li, Zhijun Yang, Bingyu Cai
Rok vydání:	2023
Předmět:	Hardware and Architecture Electrical and Electronic Engineering Condensed Matter Physics Electronic Optical and Magnetic Materials
Zdroj:	Microsystem Technologies. 29:377-385
ISSN:	1432-1858 0946-7076
DOI:	10.1007/s00542-023-05433-w
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::747f324f3e7427afb5ba7dfa74f22492 https://doi.org/10.1007/s00542-023-05433-w Zobrazit plný text záznamu Full text from SpringerLink