Laser-Assisted Chemical Vapor Deposition of Graphite
| Autor: | Nigel P. Hacker, George W. Tyndall |
|---|---|
| Rok vydání: | 1994 |
| Předmět: |
Hybrid physical-chemical vapor deposition
Plasma-enhanced chemical vapor deposition Chemistry General Chemical Engineering Ion plating Materials Chemistry Analytical chemistry Deposition (phase transition) General Chemistry Thin film Combustion chemical vapor deposition Electron beam physical vapor deposition Pulsed laser deposition |
| Zdroj: | Chemistry of Materials. 6:1982-1985 |
| ISSN: | 1520-5002 0897-4756 |
| DOI: | 10.1021/cm00047a016 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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