Simulation of HCS containing gas mixtures relevant to diamond chemical vapour deposition
| Autor: | Michael N. R. Ashfold, Dudley E. Shallcross, Paul W May, KN Rosser, James R. Petherbridge, Jeremy N. Harvey, Gareth M. Fuge |
|---|---|
| Rok vydání: | 2003 |
| Předmět: |
Arrhenius equation
Chemistry Mechanical Engineering Analytical chemistry Diamond CHEMKIN General Chemistry Chemical vapor deposition engineering.material Mole fraction Electronic Optical and Magnetic Materials Protein filament symbols.namesake Elementary reaction Materials Chemistry symbols engineering Electrical and Electronic Engineering Microwave |
| Zdroj: | Diamond and Related Materials. 12:2178-2185 |
| ISSN: | 0925-9635 |
| Popis: | Mole fractions of 24 species present within x%H Sy1%CH yH (xs0–1%) and 1%CS yH gas mixtures have been calculated 24 2 2 2 using the CHEMKIN computer package in conjunction with a mechanism based on the composite conversion: CH q 4 2H S|CS q4H .Arrhenius parameters for each elementary reaction involving S-containing species are presented, along with 22 2 associated thermodynamic properties for each species.Molecular beam mass spectrometric measurements of species mole fractions in microwave activated x%H Sy1%CH yH (xs0–1%) mixtures agree well with the model calculations, if we assume a 24 2 (reasonable) gas temperature of 1630 K.The agreement between similar measurements of both 0. 5%H S y1%CH yH and 24 2 1%CS yH hot filament activated gas mixtures is less good, but the calculations succeed in reproducing many of the observed 22 trends in species mole fraction with change in filament temperature. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|
Full Text from ScienceDirect