Rapid thermal processing of zirconia thin films produced by the sol‐gel method

Autor:	Lichun Zou, Michael Sayer, C. V. R. Vasant Kumar, R. Pascual
Rok vydání:	1991
Předmět:	Materials science Annealing (metallurgy) Nucleation General Physics and Astronomy Mineralogy Recrystallization (metallurgy) law.invention Chemical engineering law Rapid thermal processing Cubic zirconia Crystallization Thin film Sol-gel
Zdroj:	Journal of Applied Physics. 70:2348-2352
ISSN:	1089-7550 0021-8979
DOI:	10.1063/1.350333
Popis:	The kinetics of the amorphous‐to‐tetragonal transformation has been studied in sol‐gel‐derived thin films of zirconia deposited on alumina substrates. A rapid‐thermal‐annealing system was used which allowed good control of processing parameters such as temperature and heating rates. The effect of these two parameters on the transformation kinetics was studied and the experimental results were analyzed in terms of conventional nucleation and growth models. The use of two‐step thermal processing cycles shows potential for the modification of the microstructural features of crystallized films and for a reduction in processing times.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::73dd6d43ac524c9bbc214168065536e4 https://doi.org/10.1063/1.350333 Zobrazit plný text záznamu