Ion-beam direct-structuring of high-temperature superconductors
| Autor: | T. Enzenhofer, M. Dineva, M. Marksteiner, M. Peruzzi, R. Korntner, E. Cekan, Khurram Siraj, Wolfgang Lang, Dieter Bäuerle, Johannes D. Pedarnig, Elmar Platzgummer, Hans Loeschner |
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| Rok vydání: | 2006 |
| Předmět: |
Superconductivity
Diffraction Materials science High-temperature superconductivity Ion beam Condensed matter physics Condensed Matter Physics Atomic and Molecular Physics and Optics Surfaces Coatings and Films Electronic Optical and Magnetic Materials law.invention law Hall effect Electrical resistivity and conductivity Light beam Electrical and Electronic Engineering Thin film |
| Zdroj: | Microelectronic Engineering. 83:1495-1498 |
| ISSN: | 0167-9317 |
| DOI: | 10.1016/j.mee.2006.01.091 |
| Popis: | A novel method allows for a direct modification of the electric properties of high-temperature superconductors (HTS) and for patterning of devices into thin films of HTS. A low-divergence beam of light ions is directed at a thin film of HTS through a mask placed at some distance from the surface of the material. It converts the illuminated areas of the film from superconducting to semiconducting and even insulating in a single process. Computer simulations of the ion-target interactions and experimental investigations on 100-nm thick films of YBa"2Cu"3O"7 by X-ray diffraction, electrical resistivity and Hall effect measurements after cumulative irradiation are reported. A central result is that 75keV He^+ ions can penetrate through thin films of HTS without implantation effects, create point defects without destruction of the main building blocks of the crystal structure and convert a HTS to an insulating material with technically feasible ion doses of a few 10^1^5cm^-^2. |
| Databáze: | OpenAIRE |
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