Miniaturized piezo-actuated adaptive prism for biaxial optical scanning
Autor: | Ulrike Wallrabe, Pascal M. Weber, Florian Lemke, Matthias C. Wapler |
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Rok vydání: | 2019 |
Předmět: | |
Zdroj: | 2019 International Conference on Optical MEMS and Nanophotonics (OMN). |
DOI: | 10.1109/omn.2019.8925071 |
Popis: | We present a biaxial adaptive prism that allows for a simplified light path compared to scanning mirrors. Using three piezo bimorph actuators with stepless control, we actively tilt a fluid-glass interface, achieving scan angles up to 8.5° with response times down to 5.5 ms. The compact and optimized design has an outer diameter of 33 mm for a 7 mm aperture. |
Databáze: | OpenAIRE |
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