Miniaturized piezo-actuated adaptive prism for biaxial optical scanning

Autor: Ulrike Wallrabe, Pascal M. Weber, Florian Lemke, Matthias C. Wapler
Rok vydání: 2019
Předmět:
Zdroj: 2019 International Conference on Optical MEMS and Nanophotonics (OMN).
DOI: 10.1109/omn.2019.8925071
Popis: We present a biaxial adaptive prism that allows for a simplified light path compared to scanning mirrors. Using three piezo bimorph actuators with stepless control, we actively tilt a fluid-glass interface, achieving scan angles up to 8.5° with response times down to 5.5 ms. The compact and optimized design has an outer diameter of 33 mm for a 7 mm aperture.
Databáze: OpenAIRE