Structure of Diamond-Like Silicon–Carbon Films Alloyed by Vanadium
| Autor: | M. L. Shupegin, O. M. Zhigalina, I. G. Dyachkova, D. N. Khmelenin, V. E. Asadchikov, S. M. Pimenov |
|---|---|
| Rok vydání: | 2018 |
| Předmět: |
010302 applied physics
Vanadium carbide Materials science Silicon Vanadium chemistry.chemical_element Diamond 02 engineering and technology General Chemistry engineering.material 021001 nanoscience & nanotechnology Condensed Matter Physics 01 natural sciences Carbide chemistry.chemical_compound Carbon film Transition metal chemistry Chemical engineering Nanocrystal 0103 physical sciences engineering General Materials Science 0210 nano-technology |
| Zdroj: | Crystallography Reports. 63:796-801 |
| ISSN: | 1562-689X 1063-7745 |
| DOI: | 10.1134/s1063774518050334 |
| Popis: | The structure of diamond-like silicon–carbon films formed on silicon substrates by magnetron and plasmatron codeposition using a closed-field magnetron and a plasmatron activated by tungsten cathode has been studied by transmission electron microscopy. The main feature of the films alloyed by vanadium to concentrations of 12–31 at % was found to be a layered structure of the film cross section. It was established that vanadium alloying leads to the formation of vanadium carbide (VC) nanocrystals; the nanocrystal size increases from 1–2 to 10 nm. At the maximum vanadium content, VC nanocrystals have an anisotropic shape: they are extended in the direction perpendicular to the film–substrate interface. |
| Databáze: | OpenAIRE |
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