Preparation and characterization of Au-SiO2 radio frequency co-sputtered thin films
| Autor: | L. Morettini, S. Guerri, G.G. Bentini, A. Armigliato, P. Ostoja |
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| Rok vydání: | 1976 |
| Předmět: |
Diffraction
Materials science Metals and Alloys Analytical chemistry Surfaces and Interfaces Cermet Surfaces Coatings and Films Electronic Optical and Magnetic Materials Ion Characterization (materials science) Electrical resistivity and conductivity Materials Chemistry Thin film Quartz Temperature coefficient |
| Zdroj: | Thin Solid Films. 33:355-362 |
| ISSN: | 0040-6090 |
| DOI: | 10.1016/0040-6090(76)90106-1 |
| Popis: | Cermet films Au-SiO 2 have been prepared by r.f. co-sputtering from a target of gold and a target of pure quartz. Their compositions range from 2.5 vol. % Au up to 86 vol. % Au, as determined by the backscattering analysis of He ions. The morphology and structural features of such films have been observed by electron microscopy. The images and diffraction patterns corresponding to some of them are reported in this paper. The electrical performance of the cermets has been tested by resistivity and temperature coefficient of resistance measurements. |
| Databáze: | OpenAIRE |
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