| Autor: |
Bill West, Florian Adler, Helen Waechter, Marten Beels, Yu Chen, Brian Siller, Ryan Matz |
| Rok vydání: |
2016 |
| Předmět: |
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| Zdroj: |
2016 Photonics North (PN). |
| DOI: |
10.1109/pn.2016.7537897 |
| Popis: |
Over the last decade, Continuous-Wave Cavity Ring-Down Spectroscopy (CW-CRDS) has gained growing acceptance and become a field-proven trace gas measurement technique widely used in industry and at major national metrology institutes. The technology has shown remarkable diversity, being used in applications ranging from ultra-clean semiconductor fabs to harsh and dirty coal-fired boilers. Here we will present our newest developments for three very different applications: 1) continuous emissions monitoring of hydrogen chloride in stack emissions of cement and coal-fired power plants with very dirty sample gas; 2) trace moisture measurement in ultra-high purity ammonia for LED and semiconductor manufacturing, a spectroscopically challenging matrix; and, 3) detection of impurities in cryogenic liquids by adapting CW-CRDS to very cold temperatures. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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