The Development of High Performance TCO APCVD Processes for Photovoltaic Applications
| Autor: | Poodt, P., Van Deelen, J., Grob, F., Theelen, M., Winands, H., Volintiru, I., Van Mol, T., Spee, K., Kuypers, A. |
|---|---|
| Jazyk: | angličtina |
| Rok vydání: | 2009 |
| Předmět: | |
| DOI: | 10.4229/24theupvsec2009-1cv.3.9 |
| Popis: | 24th European Photovoltaic Solar Energy Conference, 21-25 September 2009, Hamburg, Germany; 258-261 For the past decade TNO has been involved in the research and development of atmospheric pressure CVD and plasma enhanced CVD processes for deposition of transparent conductive oxides, such as tin oxide and zinc oxide. The use of atmospheric deposition processes allows for large scale roll to roll manufacturing, and is therefore expected to provide a breakthrough for lowering the price of thin film PV modules. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|