Understanding the catalytic effects of H2S on CVD-growth of α-alumina: Thermodynamic gas-phase simulations and density functional theory

Autor:	Susanne Norgren, Fredrik Silvearv, Cecilia Århammar, Andreas Blomqvist, Henrik Pedersen, Rajeev Ahuja
Rok vydání:	2011
Předmět:	Materials science Surfaces and Interfaces General Chemistry Chemical vapor deposition Condensed Matter Physics Combined approach Surfaces Coatings and Films Catalysis Gas phase Catalytic effect Chemical engineering Materials Chemistry Physical chemistry Density functional theory
Zdroj:	Surface and Coatings Technology. 206:1771-1779
ISSN:	0257-8972
DOI:	10.1016/j.surfcoat.2011.09.018
Popis:	The catalytic effect of H(2)S on the AlCl(3)/H(2)/CO(2)/HCl chemical vapor deposition (CVD) process has been investigated on an atomistic scale. We apply a combined approach with thermodynamic mode ...
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::72607974da42d63dbbcd932ce2cd3eb3 https://doi.org/10.1016/j.surfcoat.2011.09.018 Zobrazit plný text záznamu Full Text from ScienceDirect