Fabrication of freestanding LiNbO3 thin films via He implantation and femtosecond laser ablation
Autor: | Jerry I. Dadap, Ophir Gaathon, Lakshmanan Vanamurthy, Sasha Bakhru, Avishai Ofan, Hassaram Bakhru, Richard M. Osgood |
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Rok vydání: | 2010 |
Předmět: |
Laser ablation
Materials science business.industry medicine.medical_treatment Laser beam machining technology industry and agriculture Analytical chemistry Surfaces and Interfaces Condensed Matter Physics Ablation Laser Exfoliation joint Surfaces Coatings and Films law.invention Ion implantation Etching (microfabrication) law medicine Optoelectronics Thin film business |
Zdroj: | Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 28:462-465 |
ISSN: | 1520-8559 0734-2101 |
DOI: | 10.1116/1.3384056 |
Popis: | The authors report using a combination of ion-implantation exfoliation and femtosecond laser ablation to fabricate thin (micrometers-thick) single-crystal films of a complex oxide, LiNbO3. The process physics for the method is bounded by the threshold for ablation and the onset of laser thermal outdiffusion of the implanted He used in exfoliation selective etching. |
Databáze: | OpenAIRE |
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