Fabrication of freestanding LiNbO3 thin films via He implantation and femtosecond laser ablation

Autor: Jerry I. Dadap, Ophir Gaathon, Lakshmanan Vanamurthy, Sasha Bakhru, Avishai Ofan, Hassaram Bakhru, Richard M. Osgood
Rok vydání: 2010
Předmět:
Zdroj: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 28:462-465
ISSN: 1520-8559
0734-2101
DOI: 10.1116/1.3384056
Popis: The authors report using a combination of ion-implantation exfoliation and femtosecond laser ablation to fabricate thin (micrometers-thick) single-crystal films of a complex oxide, LiNbO3. The process physics for the method is bounded by the threshold for ablation and the onset of laser thermal outdiffusion of the implanted He used in exfoliation selective etching.
Databáze: OpenAIRE