Techniques for picosecond OBIC measurement on ICs
| Autor: | H. Bergner, K. Hempel, U. Stamm, A. Krause |
|---|---|
| Rok vydání: | 1992 |
| Předmět: |
Materials science
Optical beam-induced current business.industry Measure (physics) Analytical chemistry Physics::Optics Condensed Matter Physics Atomic and Molecular Physics and Optics Surfaces Coatings and Films Electronic Optical and Magnetic Materials Optics Picosecond Sensitivity (control systems) Electrical and Electronic Engineering business |
| Zdroj: | Microelectronic Engineering. 16:275-286 |
| ISSN: | 0167-9317 |
| DOI: | 10.1016/0167-9317(92)90348-u |
| Popis: | Several methods for dynamic optical beam induced current investigations basing on optic and opto-electronic correlation techniques are considered and applied to ECL and n-MOS devices. They allow to measure transition times of single elements and propagation delays within and between different elements in ICs. Limits of sensitivity, applicability as well as of time-resolution are discussed. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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