Primary calibration of the volume of silicon spheres

Autor:	Kenichi Fujii, R A Nicolaus
Rok vydání:	2006
Předmět:	Materials science Silicon business.industry Applied Mathematics chemistry.chemical_element Monocrystalline silicon Interferometry Optics chemistry Volume (thermodynamics) Calibration Astronomical interferometer SPHERES business Instrumentation Engineering (miscellaneous) Beam (structure)
Zdroj:	Measurement Science and Technology. 17:2527-2539
ISSN:	1361-6501 0957-0233
DOI:	10.1088/0957-0233/17/10/001
Popis:	For direct density determination by so-called absolute procedures, the mass and the volume of a body must be determined. The paper gives an overview of dimensional measurements of silicon spheres used as density standards. Relative uncertainties for diameter measurements of less than 10−8 can only be achieved with interferometric procedures. After introducing optical interferometry the two main types of interferometers used are described in detail: plane-face interferometers and interferometers with spherical beam path. At present, uncertainties of 1 nm can be achieved for a diameter determination of silicon spheres, which corresponds to a relative volume uncertainty of ΔV/V = 3 × 10−8.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::71e927587761652ac2657ceba374eb61 https://doi.org/10.1088/0957-0233/17/10/001 Zobrazit plný text záznamu