Effect of Ga-Doping on Atomic-Layer-Deposited Ultrathin InGaO Thin Film Transistors with BEOL-Compatibility
| Autor: | Jie Zhang, Zhuocheng Zhang, Dongqi Zheng, Zehao Lin, Adam Charnas, Peide. D. Ye |
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| Rok vydání: | 2023 |
| Zdroj: | 2023 International VLSI Symposium on Technology, Systems and Applications (VLSI-TSA/VLSI-DAT). |
| DOI: | 10.1109/vlsi-tsa/vlsi-dat57221.2023.10133982 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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