Applications of PZT and Related Thin Films in Piezoelectric Microsensors

Autor:	D.E. Glumac, P. J. Schiller, Cheng-Chen Hsueh, Dennis L. Polla, William P. Robbins, C. Ye, T. Tamagawa
Rok vydání:	1991
Předmět:	Materials science business.industry engineering.material Piezoelectricity Pyroelectricity Surface micromachining Microactuator Polycrystalline silicon engineering PMUT Optoelectronics Thin film Stepper business
Zdroj:	MRS Proceedings. 243
ISSN:	1946-4274 0272-9172
DOI:	10.1557/proc-243-55
Popis:	Ferroelectric thin films have been deposited on polycrystalline silicon micromechanical structures to form both physical microsensors and microactuator devices. These devices which include acoustic pressure sensors, infrared detectors, micropositioners, and stepper motors are based on either the piezoelectric or pyroelectric properties of sol-gel Pb(ZrxTi1-x)O3 or PbTiO3 deposited on surface-machined microelectromechanical structures. Several materials, micromachining, process integration, and performance issues are introduced in the description of these devices.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::71a99a17dede0ce19d9d23b10b5e7c3f https://doi.org/10.1557/proc-243-55 Zobrazit plný text záznamu Full text from SpringerLink