Defect 3D profile estimation using SEM images

Autor:	Shashank S. Agashe, Gaurav Kumar, Sathyanarayanan Kulasekaran, Yunje Cho
Rok vydání:	2023
Předmět:	Electrical and Electronic Engineering Condensed Matter Physics Industrial and Manufacturing Engineering Electronic Optical and Magnetic Materials
Zdroj:	IEEE Transactions on Semiconductor Manufacturing. :1-1
ISSN:	1558-2345 0894-6507
DOI:	10.1109/tsm.2023.3275588
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::71a07c5f3119e09923aab24e084b7679 https://doi.org/10.1109/tsm.2023.3275588 Zobrazit plný text záznamu