| Autor: |
F. K. Kosyrev, Andrey Bolshakov, V. G. Vostrikov, V. G. Ralchenko, V. U. Dubrovckii, Vitali I. Konov, V. E. Cherkovetch, V G Naumov |
| Rok vydání: |
2006 |
| Předmět: |
|
| Zdroj: |
SPIE Proceedings. |
| ISSN: |
0277-786X |
| DOI: |
10.1117/12.694418 |
| Popis: |
Laser plasma technique for CVD synthesis of diamond in open air that dos not demand a vacuum or reaction chamber has been developed. Laser plasmatron, based on 3 kW cw CO2 laser and presented in this work, was used for CVD of diamond films on tungsten and molybdenum substrates with deposition area of about 3 - 4 times larger then plasma jet cross-section. Different modes of laser plasmatron operation with substrate movement relative to plasma core are considered. Possible directions of further investigation of laser-induced plasma CVD of diamond on large area are discussed.© (2006) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
|
