Large GaN p-n Junction Diodes of 3 mm in Diameter on Free-Standing GaN Substrates with High Breakdown Voltage

Autor: Kazuki Nomoto, Toshihiro Kawano, Tomoyoshi Mishima, Tadayoshi Tsuchiya, Tohru Nakamura, Naoki Kaneda
Rok vydání: 2012
Předmět:
Zdroj: Materials Science Forum. :1299-1302
ISSN: 1662-9752
DOI: 10.4028/www.scientific.net/msf.717-720.1299
Popis: This report describes the first to fabricate GaN p-n junction diodes on free-standing GaN substrates with a 3mm diameter. For the diode of 3 mm in diameter, the specific on-resistance and the breakdown voltage were 124 mΩ•cm2 (at 4.0 V) and -450 V, respectively. Consequently, combination of our material and device processing revealed a record fabricated device size with a high breakdown voltage and low forward leakage current in GaN vertical diodes.
Databáze: OpenAIRE