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We investigated a new method to measure the partial pressure of a binary gas system at near-atmospheric pressure conditions. The method utilizes two types of vacuum gauges, a capacitance manometer and a quartz friction pressure gauge. The partial pressure of the binary gas can be estimated by measuring the impedance change with a quartz friction pressure gauge, which depends on both viscosity and total pressure of a binary gas, and considering the total pressure change as measured by a capacitance manometer. We applied this method to measure the partial pressure of ozone in an ozone–oxygen gas mixture. The results suggested that the new method allows a partial-pressure measurement of ozone with an accuracy of Δ p =0.2 kPa , close to atmospheric pressure. The advantages of the new method include compact size, high safety standards when measuring highly reactive gases, and the allowance for in-line monitoring. |
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