MEMS mirror for flexible z-axis control in a commercial confocal microscope

Autor: Sarah J. Lukes, David L. Dickensheets
Rok vydání: 2012
Předmět:
Zdroj: 2012 International Conference on Optical MEMS and Nanophotonics.
DOI: 10.1109/omems.2012.6318846
Popis: We describe the use of a deformable membrane mirror for fast and flexible focus control in a commercial confocal microscope. En-face and oblique imaging over a 55 μm focal range has been demonstrated.
Databáze: OpenAIRE