Comprehensive Analysis of Hole-Trapping in SiN Films with a Wide Range of Time Constants Based on Dynamic C-V
| Autor: | Harumi Seki, Reika Ichihara, Yusuke Higashi, Yasushi Nakasaki, Masumi Saitoh, Masamichi Suzuki |
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| Rok vydání: | 2023 |
| Zdroj: | 2023 IEEE International Reliability Physics Symposium (IRPS). |
| Databáze: | OpenAIRE |
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