MEMS-based integrated head/actuator/slider for hard disk drives
| Autor: | M. Katayama, Ryosuke Koishi, Yukinori Ikegawa, Takahiro Imamura, Takao Koshikawa, Takeshi Ohwe |
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| Rok vydání: | 1998 |
| Předmět: |
Microelectromechanical systems
Engineering Precision engineering business.industry Acoustics Electrical engineering Computer Science Applications Microactuator Surface micromachining Control and Systems Engineering Slider Electrostatic generator Miniaturization Electrical and Electronic Engineering Actuator business |
| Zdroj: | IEEE/ASME Transactions on Mechatronics. 3:166-174 |
| ISSN: | 1083-4435 |
| DOI: | 10.1109/3516.712112 |
| Popis: | We propose a new integrated head/actuator/slider concept for hard disk drives. This slider is batch fabricated on the sacrificial layer of a wafer together with an electrostatic microactuator via micromachining technology. We present the basic integrated head/actuator/slider design, the fabrication and flying-height tests of a micromachined slider body, and the design, fabrication, and testing of a prototype electrostatic microactuator. Slider warpage was analyzed and successfully suppressed to within 0.1 /spl mu/m. The slider was flown over a glass disk at heights of 26-81 nm and at linear velocities of 5-13 m/s. The test results of the electrostatic microactuator showed a stroke of 0.55 /spl mu/m, a very high mechanical resonant frequency of 34 kHz due to its low moving mass of 0.85 /spl mu/g, and a large force, estimated to be 21.3 /spl mu/N, generated by the actuator. |
| Databáze: | OpenAIRE |
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